SilTerra Introduces C-SOI®-based Technology For MEMS And Photonics Devices

CYBERJAYA, Jan 20 (Bernama) — SilTerra Malaysia Sdn Bhd has announced the availability of a new manufacturing technology for microelectromechanical systems (“MEMS”) and Photonics devices based on Cavity Silicon-On-Insulator (“C-SOI®”) wafers produced and customised by Okmetic, a high value-added silicon wafer supplier based in Finland.
 
C-SOI® wafers are customised for SilTerra’s needs and suitable for applications in piezosensor, micromirror, accelerometer, microphone, inertial MEMS, resonator and microfluidic devices across such vertical markets as consumer, medical, industrial and automotive for the frequency range of 500kHz or below. The technology can also be used to build sensors that use MEMS-based actuation and Photonic-based sensing.

http://mrem.bernama.com/viewsm.php?idm=42196

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